JPH0519994B2 - - Google Patents

Info

Publication number
JPH0519994B2
JPH0519994B2 JP62118553A JP11855387A JPH0519994B2 JP H0519994 B2 JPH0519994 B2 JP H0519994B2 JP 62118553 A JP62118553 A JP 62118553A JP 11855387 A JP11855387 A JP 11855387A JP H0519994 B2 JPH0519994 B2 JP H0519994B2
Authority
JP
Japan
Prior art keywords
displacement
voltage
piezoelectric
container
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62118553A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63283180A (ja
Inventor
Takashi Kawai
Yasushi Myata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP62118553A priority Critical patent/JPS63283180A/ja
Publication of JPS63283180A publication Critical patent/JPS63283180A/ja
Publication of JPH0519994B2 publication Critical patent/JPH0519994B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP62118553A 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ Granted JPS63283180A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62118553A JPS63283180A (ja) 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62118553A JPS63283180A (ja) 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ

Publications (2)

Publication Number Publication Date
JPS63283180A JPS63283180A (ja) 1988-11-21
JPH0519994B2 true JPH0519994B2 (en]) 1993-03-18

Family

ID=14739434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62118553A Granted JPS63283180A (ja) 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ

Country Status (1)

Country Link
JP (1) JPS63283180A (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2586371B2 (ja) * 1992-12-22 1997-02-26 日本電気株式会社 圧電アクチュエータ
JP2874635B2 (ja) * 1996-03-28 1999-03-24 日本電気株式会社 圧電アクチュエータ変位制御方法及び装置
JP7164864B2 (ja) * 2018-08-31 2022-11-02 日本特殊陶業株式会社 圧電アクチュエータ
JP7109314B2 (ja) * 2018-08-31 2022-07-29 日本特殊陶業株式会社 圧電アクチュエータ
US20230010598A1 (en) * 2019-12-11 2023-01-12 Kyocera Corporation Piezoelectric actuator
DE102020209594B3 (de) * 2020-07-30 2021-12-30 Festo Se & Co. Kg Fluidgerät

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS6265390A (ja) * 1985-09-17 1987-03-24 Toshiba Corp 積層型圧電変位素子
JPS6364580A (ja) * 1986-09-02 1988-03-23 Hitachi Constr Mach Co Ltd 圧電アクチユエ−タ
JPS6366980A (ja) * 1986-09-09 1988-03-25 Nippon Denso Co Ltd 積層型圧電体
JPS63140661U (en]) * 1987-03-06 1988-09-16

Also Published As

Publication number Publication date
JPS63283180A (ja) 1988-11-21

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